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silicon carbide ultra-stable structures Mersen Boostec

Semiconductor and opto-mechanics OEMs

Mersen Boostec provides the silicon carbide ultra-stable structures that are now required by the semiconductor and optomechanical equipment.
Mersen Boostec provides the silicon carbide ultra-stable structures that are now required by the semiconductor and optomechanical equipment.
  • Silicon carbide ultra-stable structures

    Mersen Boostec provides the silicon carbide ultra-stable structures that are now required by the semiconductor and optomechanical equipment.

    BOOSTEC® SiC Solutions are used where ultra-precision is required, in:

    • Semiconductor industry processes,
    • EUV lithography machines,
    • Advanced measuring instruments for optical surfaces,
    • Ultra-high vacuum,
    • Scientific equipment.
  • Boostec expertise in manufacturing & design

    • Unique experience in manufacturing 3-meter class ultra-stable structures
    • Possibility of integrated solution on a single part: air bearing system, cooling with internal channels, mirror
    • From monolithic SiC parts to possibly complex assemblies, Mersen Boostec manufactures highly stable benches, baseplates, beams, sliding structures for fast and accurate positioning, chucks
  • Boostec® SiC solution

    • Open Boostec® SiC Solution configuration options
    • High mechanical strength and absence of mechanical fatigue,
    • Perfect isotropy of the SiC material,
    • Flawless polishable finish which can be used as optical reference,
    • Perfect stability over time,
    • Water and gas tight, no outgassing, no moisture absorption,
    • Wear resistance,
    • Excellent chemical inertia.
  • Product Literature

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