Semiconductor and opto-mechanics OEMs
Brochures
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Silicon carbide ultra-stable structures
Mersen Boostec provides the silicon carbide ultra-stable structures that are now required by the semiconductor and optomechanical equipment.
BOOSTEC® SiC Solutions are used where ultra-precision is required, in:
- Semiconductor industry processes,
- EUV lithography machines,
- Advanced measuring instruments for optical surfaces,
- Ultra-high vacuum,
- Scientific equipment.
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Boostec expertise in manufacturing & design
- Unique experience in manufacturing 3-meter class ultra-stable structures
- Possibility of integrated solution on a single part: air bearing system, cooling with internal channels, mirror
- From monolithic SiC parts to possibly complex assemblies, Mersen Boostec manufactures highly stable benches, baseplates, beams, sliding structures for fast and accurate positioning, chucks
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Boostec® SiC solution
- Open Boostec® SiC Solution configuration options
- High mechanical strength and absence of mechanical fatigue,
- Perfect isotropy of the SiC material,
- Flawless polishable finish which can be used as optical reference,
- Perfect stability over time,
- Water and gas tight, no outgassing, no moisture absorption,
- Wear resistance,
- Excellent chemical inertia.
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Product Literature
Technical documentation
02/10/2020
Boostec® SiC Silicon Carbide Materialpdf - 7.32 MB